We make our program codes and numerical simulation models (FEM, CFD), which we have developed over time, available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data.
| Open Source | Open Data | Open Access |
We look forward to your valuable feedback and an interactive, stimulating exchange in the context of knowledge transfer in open digital education, as well as publicly funded applied research and access to open development.
Scientific studies and research work in the field of applied physics and micromechanical systems (MEMS) at the University of Bonn and the Hahn-Schickard Institute for Applied Research in Baden-Württemberg:
Numerical simulation of MEMS
MEMS metrological characterization
Raw data from experimental measurements on MEMS devices, i.e. optically with a laser vibrometer (Polytec) and electronically with an impedance/gain phase analyzer (HP4194A: Keysight-4194A-Datasheet) are listed here:
Education and training
Scientific and technical publications and lectures, as well as poster presentations, invited papers and book contributions:
Monolithically integrated semiconductor element, its use and method for manufacturing such a semiconductor element: