We make our program codes and numerical simulation models (FEM, CFD) that we have developed over time available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data.
| Open Source | Open Data | Open Access |
We look forward to your valuable feedback and an interactive, stimulating exchange in the context of knowledge transfer in open digital education, as well as publicly funded applied research and access to open development.
Numerical Simulation of MEMS
Raw data of the experimental measurements on MEMS devices, i.e. optically using a laser vibrometer (Polytec) and electronically using a impedance/gain-phase analyzer (HP4194A: Keysight-4194A-Datasheet) are listed here: