GitHub repositories

 

We make our program codes and numerical simulation models (FEM, CFD) that we have developed over time available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data.

| Open Source | Open Data | Open Access |

We look forward to your valuable feedback and an interactive, stimulating exchange in the context of knowledge transfer in open digital education, as well as publicly funded applied research and access to open development. 

Scientific achievements

Scientific studies and research work in the field of applied physics and micromechanical systems (MEMS) at the University of Bonn and the Hahn-Schickard Institute for Applied Research in Baden-Württemberg:

PhD-Thesis

 

Physical research

Scientific research in the field of atomic-physical high-frequency and laser spectroscopy at the Institute of Applied Physics of the University of Bonn:

Echtzeit-Meßwerterfassung

 

Numerical simulation of MEMS

Structural and dynamic finite element method calculations of multiphysics tasks as well as advanced CFD simulations of MEMS sensor devices:

30y anniversary of MEMS semiconductors

 

MEMS metrological characterization

Raw data of the experimental measurements on MEMS devices, i.e. optically using a laser vibrometer (Polytec) and electronically using a impedance / gain-phase analyzer (HP4194A: Keysight-4194A-Datasheet) are listed here:

Experimentelle Verifikation

Education and training

Courses and trainings for development of Micro Electro Mechanical Systems (MEMS), as well as their system design and numerical simulation of coupled field calculations (multi physics):

Prozeß- und Bauteilsimulation in der Mikrotechnik

Scientific publications

Scientific and technical publications and lectures, as well as poster presentations, invited papers and book contributions:

Publications

 

MEMS patent

Monolithically integrated semiconductor element, use thereof and method for producing such a semiconductor element:

MEMS Patent