We make our program codes and numerical simulation models (FEM, CFD) that we have developed over time available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data.
| Open Source | Open Data | Open Access |
We look forward to your valuable feedback and an interactive, stimulating exchange in the context of knowledge transfer in open digital education, as well as publicly funded applied research and access to open development.
Scientific studies and research work in the field of applied physics and micromechanical systems (MEMS) at the University of Bonn and the Hahn-Schickard Institute for Applied Research in Baden-Württemberg:
Scientific research in the field of atomic-physical high-frequency and laser spectroscopy at the Institute of Applied Physics of the University of Bonn:
Numerical simulation of MEMS
Structural and dynamic finite element method calculations of multiphysics tasks as well as advanced CFD simulations of MEMS sensor devices:
MEMS metrological characterization
Raw data of the experimental measurements on MEMS devices, i.e. optically using a laser vibrometer (Polytec) and electronically using a impedance / gain-phase analyzer (HP4194A: Keysight-4194A-Datasheet) are listed here:
Education and training
Courses and trainings for development of Micro Electro Mechanical Systems (MEMS), as well as their system design and numerical simulation of coupled field calculations (multi physics):
Scientific and technical publications and lectures, as well as poster presentations, invited papers and book contributions:
Monolithically integrated semiconductor element, use thereof and method for producing such a semiconductor element: