GitHub repositories We make our program codes and numerical simulation models (FEM, CFD), which we have developed over time, available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data. | Open Source | Open Data | Open Access…
Monolithic bridge-on-diaphragm structure for pressure sensor applications Authors H.-J. Wagner, A. Schumacher, M. Alavi, T. Fabula, B. Schmidt Journal Microsystem Technologies, vol. 1, no. 4, pp. 191-195, 1995 Microsystem Technologies – Volume 1, Issue 4 , pp 191-195 Abstract Monolithically clamped bridge-on-diaphragm (BOD) structures for pressure sensor applications were fabricated by means of Nd: YAG-laser micromachining and anisotropic…
MEMS patent Monolithically integrated semiconductor element, use thereof and method for producing such a semiconductor element Invention DE4332653 (C1) Monolithisch integriertes Halbleiterelement, dessen Verwendung sowie Verfahren zur Herstellung eines solchen Halbleiterelements Germany DE4332653, September 1994 Inventors Erfinder ALAVI, Mani – Dipl.-Ing. Dr.rer.nat. [DE]; FABULA, Thomas – Dipl.-Phys. [DE]; SCHUMACHER, Axel – Dipl.-Phys. [DE]; WAGNER, Hans-Joachim – Dipl.-Phys. [DE] …