Doctoral thesis Physics completed exactly 30 years ago at the Institute for Micro- & Information Technology of the Hahn Schickard Society on the topic: Dynamic behaviour of micromechanical structures – Finite Element Simulation for design support and its verification by measurements Inaugural dissertation Inaugural dissertation for the acquisition of the doctorate of the Faculty…
Finite-Elemente-Modellierung frequenz-analoger Sensoren HSG-IMIT Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft für Angewandte Forschung e.V. Villingen-Schwenningen 2.1 Einleitung 2.1.1 Funktionsprinzip resonanter Sensoren Das Prinzip eines resonanten Sensors beruht auf der Abhängigkeit der Eigenfrequenz des Resonators von einer äußeren physikalischen Größe (z.B. Druck, Kraft, Temperatur), indem der Spannungszustand beeinflußt oder die Trägheit des Resonators…
Physics and microsystems technology Looking back and ´conecting the dots´, we can state that the high-tech research fields such as laser physics and the highly integrated microsystems technology (MEMS), combined with the scientific mindset of the physicist, ensure successful work in the Deep Tech segment to develop sophisticated innovative solutions together with our clients. …
GitHub repositories We make our program codes and numerical simulation models (FEM, CFD) that we have developed over time available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data. | Open Source | Open Data | Open Access…
Piezoelectric Silicon Sensors & Actuators HighTech experience that counts This project list contains a selection of projects that demonstrate our profound, long-term experience in product development and management of more complex technology projects in high-tech industries, namely in the areas of: Sensors & Actuators, MEMS & Semiconductor Manufacturing, including the semiconductor industry, as…
Fachtagung Simulation mit der Finite-Element-Methode in Feinwerk- und Mikrotechnik FH München Optimierung resonanter mikromechanischer Sensoren für mechanische Größen Abstract Der Vortrag geht auf die numerische und experimentelle Untersuchung des statischen und dynamischen Verhaltens resonanter Mikrosensoren ein. Den Schwerpunkt bildet die Simulation frequenzanaloger Druck- und Kraftsensoren auf der Basis resonanter, mikromechanischer Silizium-Bimorphstrukturen, sowie…
Monolithic bridge-on-diaphragm microstructures Abstract Monolithic bridge-on-diaphragm (BOD) microstructures for sensor applications were fabricated by means of laser machining and anisotropic etching techniques. The pressure-frequency-characteristic was measured by acoustical excitation of the microbridge to resonant vibrations and optical detection of the resonance frequency. In the pressure range between 0.8 bar and +1.0 bar the pressure-frequency-characteristic is…
Monolithic bridge-on-diaphragm structure for pressure sensor applications Authors H.-J. Wagner, A. Schumacher, M. Alavi, T. Fabula, B. Schmidt Journal Microsystem Technologies, vol. 1, no. 4, pp. 191-195, 1995 Microsystem Technologies – Volume 1, Issue 4 , pp 191-195 Abstract Monolithically clamped bridge-on-diaphragm (BOD) structures for pressure sensor applications were fabricated by means of Nd: YAG-laser micromachining and anisotropic…
Forschungsarbeiten Dynamische FEM Simulationen Diplomand: Andreas Schroth Titel: Modellierung mikromechanischer Membranen Diplomarbeit TU Chemnitz / HSG-IMIT Ort: VS-Villingen Jahr: 1992 Simulation mikromechanischer Membranen Optischer Messplatz für MEMS-Strukturen Diplomand: Michael Müller Titel: Aufbau und Inbetriebnahme eines optischen Meßplatzes zur Charakterisierung von resonanten mikromechanischen Strukturen Diplomarbeit: FH Furtwangen / HSG-IMIT Ort: VS-Villingen Jahr: 1992 Schwingungsmessung an…
Bibliography MEMS MEMS bibliography of the doctoral thesis as of December 1994. [ABV 93] Abschlussbericht zum BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung frequenzanaloger Sensoren, VDI-VDE IT GmbH, Berlin (1993) [Adler 89] E.L. Adler, Electromechanical coupling to Lamb and shear-horizontal modes in piezoelectric plates, IEEE Trans. on UFFC, Vol. 36, No. 2 (1989) 223-230 [Alavi…