GitHub repositories We make our program codes and numerical simulation models (FEM, CFD) that we have developed over time available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data. | Open Source | Open Data | Open Access…
Monolithic bridge-on-diaphragm microstructures Abstract Monolithic bridge-on-diaphragm (BOD) microstructures for sensor applications were fabricated by means of laser machining and anisotropic etching techniques. The pressure-frequency-characteristic was measured by acoustical excitation of the microbridge to resonant vibrations and optical detection of the resonance frequency. In the pressure range between 0.8 bar and +1.0 bar the pressure-frequency-characteristic is…
Herbert Reichl & Anton Heuberger (Herausgeber): Micro System Technologies ’94. 4th International Conference, Berlin 1994 Contribution Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications. Authors A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner Laser system setup Simulation results Experimental measurements Further information https://link.springer.com/journal/542/volumes-and-issues/1-1 Monolithic Bridge-on-Diaphragm Microstructures Monolithic BOD-structure