GitHub repositories We make our program codes and numerical simulation models (FEM, CFD), which we have developed over time, available to the public in the sense of open source collaboration. We have also compiled the experimental measurements of our relevant scientific work as Open Data. | Open Source | Open Data | Open Access…
Invited paper “Sensors and Materials” Special Issue : Resonant Microsensors Paper Analytical and finite element modeling of resonant silicon microsensors Authors: Thomas Fabula and Stephanus Büttgenbach Year of publication: 1997 Volume: 9 Number: 8 Pagination: 501-519 Keywords beam-on-diaphragm, pressure sensor, electromechanical coupling factor, finite-element modeling, modal analysis, mode coupling, piezoelectric thin films, resonant…
Monolithic bridge-on-diaphragm microstructures Abstract Monolithic bridge-on-diaphragm (BOD) microstructures for sensor applications were fabricated by means of laser machining and anisotropic etching techniques. The pressure-frequency-characteristic was measured by acoustical excitation of the microbridge to resonant vibrations and optical detection of the resonance frequency. In the pressure range between 0.8 bar and +1.0 bar the pressure-frequency-characteristic is…
Monolithic bridge-on-diaphragm structure for pressure sensor applications Authors H.-J. Wagner, A. Schumacher, M. Alavi, T. Fabula, B. Schmidt Journal Microsystem Technologies, vol. 1, no. 4, pp. 191-195, 1995 Microsystem Technologies – Volume 1, Issue 4 , pp 191-195 Abstract Monolithically clamped bridge-on-diaphragm (BOD) structures for pressure sensor applications were fabricated by means of Nd: YAG-laser micromachining and anisotropic…
Herbert Reichl & Anton Heuberger (Herausgeber): Micro System Technologies ’94. 4th International Conference, Berlin 1994 Contribution Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications. Authors A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner Laser system setup Simulation results Experimental measurements Further information https://link.springer.com/journal/542/volumes-and-issues/1-1 Monolithic Bridge-on-Diaphragm Microstructures Silicon BOD-structures Monolithic BOD-structure
MEMS patent Monolithically integrated semiconductor element, use thereof and method for producing such a semiconductor element Invention DE4332653 (C1) Monolithisch integriertes Halbleiterelement, dessen Verwendung sowie Verfahren zur Herstellung eines solchen Halbleiterelements Germany DE4332653, September 1994 Inventors Erfinder ALAVI, Mani – Dipl.-Ing. Dr.rer.nat. [DE]; FABULA, Thomas – Dipl.-Phys. [DE]; SCHUMACHER, Axel – Dipl.-Phys. [DE]; WAGNER, Hans-Joachim – Dipl.-Phys. [DE] …