FE-Modellierung resonanter Sensoren

Deep Technology, Industrie, Innovation, R&D, Wissenschaft

Finite-Elemente-Modellierung frequenz-analoger Sensoren   HSG-IMIT Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft für Angewandte Forschung e.V.,  Villingen-Schwenningen   2.1 Einleitung 2.1.1 Funktionsprinzip resonanter Sensoren Das Prinzip eines resonanten Sensors beruht auf der Abhängigkeit der Eigenfrequenz des Resonators von einer äußeren physikalischen Größe (z.B. Druck, Kraft, Temperatur), indem der Spannungszustand beeinflußt oder die Trägheit des Resonators…

FE modeling of resonant sensors

Deep Technology, Engineering, Innovation, R&D

Finite element modeling of frequency-analog sensors   HSG-IMIT Institute for Micro- and Information Technology of the Hahn-Schickard-Gesellschaft for Applied Research e.V., Villingen-Schwenningen     2.1 Introduction 2.1.1 Functional principle of resonant sensors The principle of a resonant sensor is based on the dependence of the natural frequency of the resonator on an external physical variable…

Laser physics and MEMS applications

Bildung, Deep Technology, Innovation, R&D, Univ, Wissenschaft

Physics and microsystems technology Looking back and ´conecting the dots´, we can state that the high-tech research fields such as laser physics and the highly integrated microsystems technology (MEMS), combined with the scientific mindset of the physicist, ensure successful work in the Deep Tech segment to develop sophisticated innovative solutions together with our clients.  …

30y anniversary of MEMS semiconductors

CAE, Deep Technology, Industrie, R&D, Wissenschaft

Piezoelectric Silicon Sensors & Actuators     HighTech experience that counts This project list contains a selection of projects that demonstrate our profound, long-term experience in product development and management of more complex technology projects in high-tech industries, namely in the areas of: Sensors & Actuators, MEMS & Semiconductor Manufacturing, including the semiconductor industry, as…

Publications

CAE, Engineering, Innovation, MINT, PLM, R&D, Software, Wissenschaft

Publications Papers in scientific & technical journals T. Brenner, S. Büttgenbach, T. Fabula, W. Rupprecht: „Real-time data acquisition system for laser and radiofrequency spectroscopy“, Journal of Physics E: Scientific Instruments, 21 (1988) 1150-1153 Thomas Fabula: „Finite-Elemente-Modellierung in der Mikromechanik“, Mikroelektronik Bd. 6 (1992) Heft 1, Fachbeilage Mikroperipherik, S.II Th. Fabula, B. Schmidt: „Modellierung mikromechanischer Sensoren…

FEM-Simulation in Feinwerk- und Mikrotechnik

CAE, Engineering, PLM, R&D

Fachtagung: Simulation mit der Finite-Element-Methode in Feinwerk- und Mikrotechnik FH München   Optimierung resonanter mikromechanischer Sensoren für mechanische Größen     Abstract Der Vortrag geht auf die numerische und experimentelle Untersuchung des statischen und dynamischen Verhaltens resonanter Mikrosensoren ein. Den Schwerpunkt bildet die Simulation frequenzanaloger Druck- und Kraftsensoren auf der Basis resonanter, mikromechanischer Silizium-Bimorphstrukturen, sowie…

Silicon BOD-structures

Deep Technology, Innovation, R&D, Wissenschaft

Monolithic bridge-on-diaphragm microstructures   Abstract Monolithic bridge-on-diaphragm (BOD) microstructures for sensor applications were fabricated by means of laser machining and anisotropic etching techniques. The pressure-frequency-characteristic was measured by acoustical excitation of the microbridge to resonant vibrations and optical detection of the resonance frequency. In the pressure range between 0.8 bar and +1.0 bar the pressure-frequency-characteristic is…

Monolithic BOD-structure

Deep Technology, Innovation, R&D, Wissenschaft

Monolithic bridge-on-diaphragm structure for pressure sensor applications     Authors H.-J. Wagner, A. Schumacher, M. Alavi, T. Fabula, B. Schmidt Journal Microsystem Technologies, vol. 1, no. 4, pp. 191-195, 1995 Microsystem Technologies – Volume 1, Issue 4 , pp 191-195 Abstract Monolithically clamped bridge-on-diaphragm (BOD) structures for pressure sensor applications were fabricated by means of Nd: YAG-laser micromachining and anisotropic…

Micro System Technologies 94

Deep Technology, Industrie, R&D

Herbert Reichl & Anton Heuberger (Herausgeber):   Micro System Technologies ’94. 4th International Conference, Berlin 1994   Contribution Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications. Authors A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner Laser system setup Simulation results Experimental measurements Further information https://link.springer.com/journal/542/volumes-and-issues/1-1   Monolithic Bridge-on-Diaphragm Microstructures Silicon BOD-structures Monolithic BOD-structure