Jan311995

Bibliography

MEMS

MEMS bibliography of the doctoral thesis as of December 1994.

 

[ABV 93] Abschlussbericht zum BMFT-Verbundprojekt: Einsatz der Mikromechanik zur Herstellung frequenzanaloger Sensoren, VDI-VDE IT GmbH, Berlin (1993)

[Adler 89] E.L. Adler, Electromechanical coupling to Lamb and shear-horizontal modes in piezoelectric plates, IEEE Trans. on UFFC, Vol. 36, No. 2 (1989) 223-230

[Alavi 92a] M. Alavi, S. Büttgenbach, A. Schumacher, H.-J. Wagner, Fabrication of microchannels by laser machining and anisotropic etching of silicon, Sensors and Actuators A, 32 (1992) 299-302

[Alavi 92b] M. Alavi, Th. Fabula, A. Schumacher, H.-J. Wagner, Monolithic Microbridges in Silicon Using Laser Machining and Anisotropic Etching, EUROSENSORS VI, San Sebastian (1992) erschienen in: Sensors and Actuators A, 37-38 (1993) 661-665

[Alavi 93] M. Alavi, Th. Fabula, A. Schumacher, H.-J. Wagner, Monolithisch integriertes Halbleiterelement, dessen Verwendung sowie Verfahren zur Herstellung eines solchen Halbleiterelementes, Deutsche Patentanmeldung, Nr.: 4332653 (1993)

[Albert 84] W.C. Albert, Force sensing using quartz crystal flexure resonator, Proc. 38th. Annual Frequency Control Symposium (1984) 233-239

[Albert 88] W.C. Albert, A low cost force sensing crystal resonator applied to weighing, Proc. 42th. Annual Frequency Control Symposium (1988) 78-84

[Allik 70] H. Allik, T.J.R. Hughes, Finite element method for piezoelectric vibration, Int. Journal for Numerical Methods in Engineering, Vol. 2 (1970) 151-157

[Andres 86] M.V. Andres, K.W.H. Foulds and M.J. Tudor, Optically activation of a silicon vibrating sensor, Electronics Letters, Vol. 22, No. 21 (1986) 1097-1099

[Andres 87] M.V. Andres, K.W.H. Foulds and M.J. Tudor, Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors, Electron. Lett. 23 (1987) 952-954

[Andres 88] M.V. Andres, K.W.H. Foulds and M.J. Tudor, Sensitivity and mode spectrum of a frequency-output silicon pressure sensor, Sensors and Actuators, 5 (1988) 417-426

[Andrews 93a] M. Andrews, I. Harris, G. Turner, A comparison of squeeze-film theory with measurements on a microstructure, Sensors and Actuators A, 36 (1993) 79-87

[Andrews 93b] M.K. Andrews, G.C. Turner, P.D. Harris, I.M. Harris, A resonant pressure sensor based on a squeezed film of gas, Sensors and Actuators A, 36 (1993) 219-226

[ASEE 93] ANSYS Error Estimation Seminar (Fehleranalyse in der FEM), CADFEM GmbH, Ebersberg / München (1993)

[AUM IV] ANSYS User’s Manual for Revision 5.0, Volume IV, Theory, ed. Peter Kohnke, Houston, PA, USA (1992)

[Bach] W.H. Bach, HSG-IMIT, persönliche Mitteilung

[Bartuch 93] H. Bartuch, S. Büttgenbach, Th. Fabula, H. Weiss, Resonante Silizium-Sensoren mit elektrothermischer Anregung und DMS in Metalldünnfilmtechnologie, SENSOR 93, Nürnberg, 11.-14. Oktober (1993) 17-24

[Bathe 82] K.J. Bathe, Finite element procedures in engineering analysis, Prentice Hall Inc., Englewood Cliffs, New Jersey (1982) und deutsche Ausgabe: Finite-Elemente-Methoden, Springer-Verlag, Berlin (1990)

[Beeby 94] S.P. Beeby and M.J. Tudor, Modelling and optimisation of micromachined silicon resonators, Proc. MME ’94, Pisa, Italy (1994) 44-47

[Becker 86] E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Münchmeyer, Fabrication of microstructures with high aspect ratios and great structural heigths by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process), Microelectronic Eng. 4 (1986) 35

[Bin 87] T.Y. Bin, R.S. Huang, CAPSS: a thin diaphragm capacitive pressure sensor simulator, Sensors and Actuators 11 (1987), 1-22

[Blevins 84] R.D. Blevins, Formulas for natural frequency and mode shapes, Krieger Publishing Company, Malabar/Florida (1984)

[Blom 90] F.R. Blom, Resonant silicon beam force sensor, Dissertation, Universität Twente, Enschede, Niederlande (1990) erschienen in: Sensors and Actuators A21-23 (1990) 226

[Blom 92] F.R. Blom, S. Bouwstra, M. Elwenspoek, J.H.J. Fluitman, Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry, J. Vac. Sci. Technol. B, Vol. 10, No. 1 (1992) 19-26 PDF

[Bogdanova 93] N. Bogdanova, R. Baizar, V. Voronin, E. Krasnogenov, Semiconductor string pressure sensor, Sensors and Actuators A, 39 (1993) 125-128

[Boley 85] B.A. Boley, J.H. Weiner, Theory of thermal stresses, R.E. Krieger Publishing Comp., John Wiley and Sons (1985)

[Boucher 81] D. Boucher, M. Lagier, C. Maerfeld, Computation of the vibrational modes for piezoelectric array transducers using a mixed finite element-perturbation method, IEEE Trans. on Sonics and Ultrasonics, Vol. SU-28, No. 5 (1981) 318-330 PDF

[Bouwstra 90] S. Bouwstra, Resonating microbridges mass flow sensor, Dissertation, Universität Twente, Enschede, Niederlande (1990) PDF

[Bouwstra 91] S. Bouwstra, B. Geijselaers, On the resonance frequencies of microbridges, Proc. TRANSDUCERS ’91, Digest of technical papers, San Francisco (1991) 538-542 PDF

[Braess 91] D. Braess, Finite Elemente, Springer-Verlag, Berlin (1991)

[Braxmaier 92a] C. Braxmaier, Aufbau und Erprobung eines Messplatzes zur Untersuchung des dynamischen Verhaltens von mikromechanischen Grundstrukturen, Diplomarbeit, FH-Furtwangen / HSG-IMIT, Villingen-Schwenningen (1992) unveröffentlicht

[Braxmaier 92b] C. Braxmaier, Fremdanregung von Balken durch Dickenschwinger zur Eigenfrequenzbestimmung, Praktikumsarbeit, HSG-IMIT, VS-Villingen (1992)

[Brice 85] J.C. Brice, Crystals for quartz resonators, Rev. Modern Physics, Vol. 57, No. 1 (1985) 105

[Brissaud 91] M. Brissaud, Characterization of piezoceramics, IEEE Trans. on UFFC, Vol. 38, No. 6 (1991) 603-617

[Brombley 83] E.I. Brombley, et al., A technique for the determination of stress in thin films, J. Vac. Sci. Technol., Vol. B1(4) (1983) 1369

[Büttgenbach 91a] S. Büttgenbach, Mikromechanik, B. G. Teubner, Stuttgart (1991)

[Büttgenbach 91b] S. Büttgenbach, Frequenzanaloge Sensoren, in: Technologietrends in der Sensorik, VDI Bildungswerk, Düsseldorf (1991)

[Burrer] Ch. Burrer, persönliche Mitteilung

[Burrer 93] Ch. Burrer, J. Esteve, Thermally driven micromechanical bridge resonators, EUROSENSORS VII, Budapest (1993)

[Buser 89] R.A. Buser, Theoretical and experimental investigations on silicon single crystal resonant structures, Dissertation, Universität Neuchatel (1989) – Resonant silicon structures, Volume 17, Issues 1–2, 3 May 1989, Pages 145-154

[Buser 91a] R.A. Buser, L. Schultheis, N.F. de Rooij, Silicon pressure sensor based on a resonating element, Sensors and Actuators A, 25-27 (1991) 717-722

[Buser 91b] R.A. Buser, N.F. de Rooij, ASEP: a CAD program for silicon anisotropic etching, Sensors and Actuators A 28, (1991) 71-78

[Buser 94] R.A. Buser, Resonant Sensors, in: Sensors, Volume 7, Mechanical Sensors, eds.: H.H. Bau, N.F. de Rooij, B. Kloeck, VCH Verlagsgesellschaft, Weinheim (1994) 205-284

[Camon 90] H. Camon, Micromachining: First development of an atomic scale chemical etching simulator, MME ’90, 2nd Workshop on Micromachining Micromechanics and Microsystems, Berlin (1990) – Sensors and Actuators A: Physical Vol. 33, Issue 1-2, May 1992, Pages 103-105

[Chau 87] H.-L. Chau, K.D. Wise, Scaling limits in batch-fabricated silicon pressure Sensors, IEEE Transactions on Electronic Devices, Vol. ED-34, No. 4 (1987) 850-858 – DOI:10.1109/T-ED.1987.23006

[Challande 90] P. Challande, Optimizing ultrasonic transducers based on piezoelectric composites using a finite-element method, IEEE Trans. on UFFC, Vol. 37, No. 2 (1990) 135-140 – DOI: 10.1109/58.55302

[Char 91] B.W. Char, K.O. Geddes, G.H. Gonnet, B.L. Leong, M.B. Monagan, S.M. Watt, MAPLE V – Language Reference Manual, Springer-Verlag, New York (1991)

[Christen 83] M. Christen, Air and gas damping of quartz tuning forks, Sensors and Actuators, 4 (1983) 555-564

[Ciarlet 78] P.G. Ciarlet, The finite element method for elliptical problems, North-Holland, Amsterdam (1978)

[Ciarlet 91] P.G. Ciarlet, J.L. Lions, (Eds.), Handbook of numerical analysis, Vol. II: Finite Element Methods (Part 1), North-Holland, Amsterdam (1991) – DOI: 10.1002/zamm.19920721203

[Clayton 87] L.D. Clayton, S.R. Swanson and E.P. Eer Nisse, Modifications of the double-ended tuning fork geometry for reduced coupling to its surroundings: finite element analysis and experiment, IEEE Trans. on UFFC 34 (1987) 243-252

[COMP] COMPOSITE, User Manual, Version 1.5, FhG-AIS, Erlangen

[Crary 91a] S.B. Crary, O. Juma, Y. Zhang, Software tools for designers of sensors and actuator CAE Systems, Proc. TRANSDUCERS ’91, Digest of technical papers, San Francisco (1991) 498-501

[Crary 91b] S.B. Crary, R.A. Buser, F. Pourahmadi, Short course: modeling of micromechanical devices, Proc. TRANSDUCERS ’91, Digest of technical papers, San Francisco (1991)

[CRC89] CRC Handbook of Chemistry and Physics, CRC Press, Inc., Boca Raton, Florida, USA 70th edn. (1989)

[D’Amico 89] A. D’Amico, E. Verona, SAW sensors, Sensors and Actuators, 17 (1989) 55-56 – DOI: 10.1016/0250-6874(89)80064-2

[Danel 91] J.S. Danel, G. Delapierre, Anisotropic crystal etching: a simulation program, EUROSENSORS VI, Rome (1991) 267-282

[Deschanvres 92] J.L. Deschanvres, P. Rey, G. Delabouglise, M. Labeau, J.C. Joubert, J.C. Peuzin, Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications, Sensors and Actuators A, 33 (1992) 43-45 – DOI: 10.1016/0924-4247(92)80223-P

[Douma 92] B.S. Douma, P. Eigenraam, P. Hatlem, Modelling the pressure and temperature sensitivity of an optically excited micromachined silicon sensor for permanently installed downhole monitoring system, Sensors and Actuators A, 31 (1992) 215-219 – DOI: 10.1016/0924-4247(92)80107-E

[Dufour 92] M. Dufour, M.T. Delaye, F. Michel, J.S. Danel, B. Diem, G. Delapierre, A comparsion between micromachined pressure sensors using quartz or silicon vibrating beams, Sensors and Actuators A, 34 (1992) 201-209 – DOI: 10.1016/0924-4247(92)85003-K

[DRUCK 91] DRUCK Ltd., Firetree Lane, Groby, Leicester/GB, Datenblätter: RPT 100 – Resonant pressure sensor (1991)

[Eccardt 92] P.-C. Eccardt, ANSYS-Seminarunterlagen: Piezoelektrizität, CADFEM GmbH, Ebersberg (1992)

[Eer Nisse 88] E.P. Eer Nisse, R.W. Ward, R.B. Wiggins, Survey of quartz bulk resonator sensor technologies, IEEE Transactions on UFFC, Vol. 35, No. 3 (1988) 323-330 – DOI:10.1109/58.20453

[Eisley 64] J.G. Eisley, Nonlinear vibration of beams and rectangular plates, J. of Appl. Mathematics and Physics, 15 (1964) 167-175

[Engelhardt 89] W. Engelhardt, Messung der inneren Spannung von Silizium-Membranen, Diplomarbeit, Universität Stuttgart (1989) unveröffentlicht

[Fabula 92a] Th. Fabula, A. Schroth, Simulation des dynamischen Verhaltens mikromechanischer Membranen, VDI-Fachtagung für Geräte- und Mikrosystemtechnik, TU Chemnitz (1992), VDI-Bericht 960, VDI-Verlag Düsseldorf (1992)

[Fabula 92b] Th. Fabula, Dynamische Berechnungen in der Mikromechanik – Simulation Messung, 10. ANSYS Users’ Meeting, Arolsen, 28.-30.10.1992, CADFEM GmbH, Grafing

[Fabula 93a] Th. Fabula, H.-J. Wagner, B. Schmidt, S. Büttgenbach, Triple beam resonant silicon force sensor based on piezoelectric thin films, EUROSENSORS VII, Budapest (1993), erschienen in: Sensors and Actuators A: Physical, Vol. 42, No. 1-3 (1994) 375-380 – DOI: 10.1016/0924-4247(94)80015-4

[Fabula 93b] Th. Fabula, N. Hey, S. Messner, Gekoppelte Feldberechnung eines mikromechanischen Strömungssensors, 11. CADFEM Users’ Meeting, Bamberg, 27.-29.10.1993, CADFEM GmbH, Grafing

[Fabula 97] Th. Fabula and S. Büttgenbach, Analytical and finite element modeling of resonant silicon microsensors, Sensors and Materials, Special issue on resonant microsensors in Sensors and Materials 9(8): 501-519, January 1997 PDF

[Fan 87] L.-S. Fan, Y.-C. Tai, R.S. Muller, Pin joints, gears, springs, cranks, and other novel micromechanical structures, Proc. TRANSDUCERS ’87, Digest of technical papers, Tokio, Japan (1987) 849-852

[FDI] Fluid Dynamics International, Inc., Evanston, Illinois, 60201 USA

[FTM 91] FIDAP Theoretical Manual, Revision 6.0, Fluid Dynamics International, Inc., Evanston, Illinois, USA (1991)

[Feynman 59] R. Feynman, There’s plenty of room at the bottom, Annual meeting of the american physical society, in: Miniaturization, H.D. Gilbert, Ed., Van Nostrand Reinhold, New York, NY 10003 (1959)

[Feynman 83] R. Feynman, Infinitesimal machinery, Vortrag vom 23.01.1983 am Jet Propulsion Laboratory, Pasadena, CA, abgedruckt in: J. Microelectromechanical Systems, Vol. 2, No. 1 (1993) 4-14 PDF

[Flik] G. Flik, Robert Bosch GmbH, persönliche Mitteilung

[Franz 88] J. Franz, Piezoelektrische Sensoren auf Siliziumbasis für akustische Anwendungen, VDI-Berichte, Reihe 10: Informatik/Kommunikationstechnik, Nr. 87, VDI-Verlag Düsseldorf (1988)

[Friedrich 90] W. Friedrich, R. Lerch, K. Prestele, R. Soldner, Simulation of piezoelectric Lamb wave delay lines using a finite element method, IEEE Trans. on UFFC, Vol. 37, No. 2 (1990) 248-254

[Frühauf 90] J. Frühauf, Simulation of orientation dependent etching of masked silicon structures (SIMODE), MME ’90, 2nd Workshop on Micromachining Micromechanics and Microsystems, Berlin (1990)

[Funk 93] K. Funk, Entwurf und monolithische Integration einer Schaltung für mikromechanische Sensoren mit piezoelektrischem Antrieb, Diplomarbeit, TU Chemnitz (1993) unveröffentlicht

[Funk 94] K. Funk, Th. Fabula, G. Flik, F. Lärmer, Piezoelectrical driven resonant force sensor: fabrication and crosstalk, Proc. MME ’94, Pisa, Italy (1994) – DOI: 10.1016/0924-4247(94)80015-4

[Gagnepain 90] J.-J. Gagnepain, Resonators, detectors, and piezoelectrics, Academic Press, Inc. (1990), ISBN 0-12-014677-0 – DOI: 10.1016/S0065-2539(08)60588-0

[Geijselaers 91] H.J.M. Geijselaers, H. Tijdeman, The dynamic mechanical characteristics of a resonating microbridge mass-flow sensor, Sensors and Actuators A, 29 (1991) 37-41

[Gerova 81] E.V. Gerova, N.A. Ivanov, K.I. Kirov, Deposition of AlN thin films by magnetron reactive sputtering, Thin Solid Films, 81 (1981) 201-206

[Gerdau] R.W. Gerdau, HSG-IMIT, persönliche Mitteilung

[Gieseler 92] T. Gieseler, J.-U. Meyer, Plattenwellen für Biosensoren, Mikroelektronik 6, Nr.2, Beilage Mikroperipherik (1992) S. XLV

[Goldstein 78] H. Goldstein, Klassische Mechanik, Akademische Verlagsgesellschaft, 5. Auflage, Wiesbaden (1978)

[Götz] S. Götz, Robert Bosch GmbH, persönliche Mitteilung

[Göhner 93] U. Göhner, ANSYS-Seminarunterlagen: Fehleranalyse in der FEM, CADFEM GmbH, Ebersberg (1993)

[Grabowski 91] R. Grabowski, Dünnschichtkurs, FhG-IPM, Freiburg (1991)

[Greenwood 84] J.C. Greenwood, Etched silicon vibrating sensor, J. Phys. E: Sci. Instrum. Vol. 17 (1984) 650-652

[Greenwood 87] J.C. Greenwood, Resonator device, European patent application, Publ. no. 0-244-086

[Grenwood 88] J.C. Greenwood, D.W. Satchell, Miniature silicon resonant pressure sensor, IEE Proceedings, Vol. 135, No. 5 (1988) 369-372

[Greenwood 93] J.C. Greenwood, T. Wray, High accuracy pressure measurement with a silicon resonant sensor, Sensors and Actuators A, 37-38 (1993) 82-85

[Guckel 90] H. Guckel, J.J. Sniegowski, T.R. Christenson, F. Raissi, The application of finegrained, tensile polysilicon to mechanically resonant transducers, Sensors and Actuators, A21-A23 (1990) 346-351

[Hackbusch 86] W. Hackbusch, Theorie und Numerik elliptischer Differentialgleichungen, B.G. Teubner, Stuttgart (1986)

[Haffner 92] H. Haffner, Untersuchung zu Toleranzen und Fehlern in Lithographie- und Ätzprozessen, Diplomarbeit, TU Chemnitz / HSG-IMIT, Villingen-Schwenningen (1992) unveröffentlicht

[Heiland 66] Heiland, Ibach, Pyroelectric properties of zinc oxid, Solid State Comm. 4 (1966) 353

[Hauden 92] D. Hauden, M. Hoummady, A. Chonjan, F. Bastien, Elastic wave sensors – quartz technological channel and silicon technology, Sensors and Actuators A, 32 (1992) 99-102

[Heckmann 25] G. Heckmann, Ergeb. exakt Naturwiss. 4 (1952) 100

[Heuberger 89] A. Heuberger (Hrsg.), Mikromechanik, Springer Verlag, Berlin (1989)

[Hellwege 88] K.-H. Hellwege, Einführung in die Festkörperphysik, 3. Auflage, Springer-Verlag, Berlin (1988)

[Hossack 91] J.A. Hossack, G. Hayward, Finite-element analysis of 1-3 composite transducers, IEEE Trans. on UFFC, Vol. 38, No. 6 (1991) 618-629

[Howe 87] R.T. Howe, Resonant microsensors, Proc. TRANSDUCERS ’87, Digest of technical papers, Tokio, Japan (1987) 843-848

[IEEE 78] An American National Standard: IEEE Standard on Piezoelectricity, ANSI/IEEE Std. 176-178, American National Standards Institute (1978)

[Ikeda 88a] Ikeda, Kyoichi, Tachikawa, Watanabe, Tetsuya, Musashino, Higashino, Yasushi, Fuchu, Schwingungswandler, Patentschrift DE 3630368 C2 (1988)

[Ikeda 88b] K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida, K. Harada, Silicon pressure sensor with resonant strain gauge built into diaphragm, Proc. of the 7th Sensor Symposion, Tokyo, Japan (1988) 55-58

[Ikeda 88c] K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida, Three dimensional micromachining of silicon resonant strain gage, Proc. of the 7th Sensor Symposion, Tokyo, Japan (1988) 193-196

[Ikeda 90a] T. Ikeda, Fundamentals of Piezoelectricity, Oxford University Press, Oxford (1990)

[Ikeda 90b] K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida,K. Harada, Silicon pressure sensor integrates resonant strain gauge on diaphragm, Sensors and Actuators, A21-A23 (1990) 146-150

[Jagfeld 91] M. Jagfeld, G. Müller, K. Schweizerhof, U. Stelzmann, E.K. Wang, ANSYS-Seminarunterlagen: Dynamische Berechnungen, CADFEM GmbH, Ebersberg (1991)

[Jauch 94] A. Jauch, Spannungsarmes Kleben mikromechanischer Bauteile, Diplomarbeit, FH-Furtwangen / HSG-IMIT, Villingen-Schwenningen (1994)

[Johnson 91] B.P. Johnson, S. Kim, J.K. White, S.D. Senturia, J. White, MEMCAD capacitance calculations for mechanically deformed square diaphragm and beam microstructures, Proc. TRANSDUCERS ’91, Digest of technical papers, San Francisco (1991) 494-497

[Jones 88] R.E. Jones, J.M. Naden, R.C. Neat, Optical-fibre sensors using micromachined silicon resonant elements, IEE Proceedings, Vol. 135, No. 5 (1988) 353-358

[Kagawa 74] Y. Kagawa, T. Yamabuchi, Finite element simulation of two-dimensional electromechanical resonators, IEEE Trans. on Sonics and Ultrasonics, Vol. SU-21, No. 4 (1974) 275-283

[Kagawa76a] Y. Kagawa, T. Yamabuchi, A finite element approach to electromechanical problems with an application to energy-trapped and surface-wave devices, IEEE Trans. on Sonics and Ultrasonics, Vol. SU-23, No. 4 (1976) 263-272

[Kagawa 76b] Y. Kagawa, T. Yamabuchi, Finite element approach for a piezoelectric circular rod, IEEE Trans. on Sonics and Ultrasonics, Vol. SU-23, No. 6 (1976) 379-385

[Kamins 90] T.I. Kamins, Design properties of polysilicon crystalline silicon, Sensors and Actuators, A21-A23 (1990) 817-824

[Kawamura 87] Y. Kawamura, K. Sato, T. Terasawa, S. Tanaka, Si cantilever-oscillator as a vacuum sensor, Proc. TRANSDUCERS ’87, Digest of technical papers, Tokio, Japan (1987)

[Kim 86] C.S. Kim, S.M. Dickinson, The flexural vibration of slightly curved slender beams subject to axial end displacement, J. of Sound and Vibration, Vol. 104, No. 1 (1986) 170-175

[Kim 87] E.S. Kim, R.S. Muller, IC-Processed piezoelectric microphone, IEEE Electron Device Letters, Vol. EDL-8, No. 10 (1987) 467-468

[Kirman 83] R.G. Kirman, A vibrating quartz force sensor transducer, Transducers TEMPCON Conference Papers, London, 14-16 June (1983) 97-121

[Kittel 88] C. Kittel, Einführung in die Festkörperphysik, 7. Auflage, R. Oldenburg Verlag GmbH, München (1988)

[Kohnke 92] P. Kohnke, ed., ANSYS User’s Manual for Revision 5.0, Volume IV, Theory, Swanson Analysis Systems, Inc., Houston, PA, USA (1992)

[Koppelmann 89] G.M. Koppelmann, OYSTER – a 3D structural simulator for micro electromechnical design, MEMS ’89, Salt Lake City (1989), erschienen in: Sensors and Actuators, Vol. 20, (1989) 179

[Koide 91] A. Koide, K. Sato, S. Tanaka, Simulation of two dimensional etch profile of silicon during orientation-dependent anisotropic etching, MEMS ’91, Nara, Japan (1991)

[Kvisteroy 92] T. Kvisteroy, O.H. Gusland, B. Stark, H. Nakstad, M. Eriksrud, B. Bjornstad, Optically excited silicon sensor for permanently installed downhole pressure monitoring applications, Sensors and Actuators, A31 (1992) 164-167

[Lakin 82] K.M. Lakin, J.S. Wang, A.R. Landin, Aluminium nitride thin film and composite bulk wave resonators, Proc. 36th Annual Frequency Control Symposium (1982) 517-524

[Lanceleur 92] P. Lanceleur, J.F. de Belleval, N. Mercier, Modeling of transient deformation of piezoelectric ceramics, IEEE Trans. on UFFC, Vol. 39, No. 2 (1992) 293-301

[Landau 74] L.D. Landau, E.M. Lifsic, Theoretische Physik, Elastizitätstheorie, Band VII, ungarische Ausgabe: Tankönyvkiado, Budapest (1974)

[Langdon 85] R.M. Langdon, Resonator sensors – a review, J.Phys.E: Sci.Instrum., Vol. 18 (1985) 103

[Landolt-Börnstein 82] Landolt-Börnstein, Zahlenwerte und Funktionen aus Naturwissenschaft und Technik, Gruppe III, Band 17a, Springer Verlag, Berlin (1982)

[Lee 82] K.W. Lee, K.D. Wise, SENSIM: A simulation program for solid-state pressure sensors, IEEE Trans. on Electron Devices, Vol. ED-29, No. 1 (1982) 34-41

[Lerch 88] R. Lerch, Finite element analysis of piezoelectric transducers, Proc. IEEE Ultrasonics Symposium (1988) 643-654

[Lerch 90] R. Lerch, Simulation of piezoelectric devices by two- and three-dimensional finite elements, IEEE Trans. on UFFC, Vol. 37, No. 2 (1990) 233-247

[Lewin 90] A. Lewin, F. Mohr, H. Selbach, Heterodyn-Interferometer zur Vibrationsanalyse, Technisches Messen 57, Heft 9 (1990) 335-345

[Lindberg 93] U. Lindberg, J. Söderkvist, T. Lammerink, M. Elwenspoek, Quasi-buckling of micromachined beams, MME ’93 Micro Mechanics Europe (1993) 115-118

[Lorenz 85] J. Lorenz, J. Pelka, H. Ryssel, A. Sachs, A. Seidl, M. Svoboda, COMPOSITE – A Complete Modeling Program of Silicon Technology, IEEE Trans. on CAD, Vol. CAD-4, No. 4 (1985) 1977

[Maibach 92] J. Maibach, D. Maier-Schneider, E. Obermeier, Charakterisierung elastischer Eigenschaften dünner Filme durch Messung der Membrandurchbiegung, VDI-Berichte, Nr. 939 (1992) 369-374

[Marsal 89] D. Marsal, Finite Differenzen und Elemente, Springer Verlag, Berlin (1989)

[Marhöfer 90] Marhöfer, Design tools for the development of MEMS, Micro System Technologies, Berlin (1990)

[Martin 90] B.A. Martin, S.W. Wenzel, R.M. White, Viscosity and density sensing with ultrasonic plate waves, Sensors and Actuators, A21-A23 (1990) 704-708

[Matzenmiller 93] A. Matzenmiller, W. Rust, ANSYS-Seminarunterlagen: Nichtlinearitäten, CADFEM GmbH, Grafing (1993)

[Meirovitch 67] L. Meirovitch, Analytical methods in vibrations, Macmillan Publishing Co., Inc., New York (1967)

[Meirovitch 86] L. Meirovitch, Elements of vibration analysis, 2nd Edition, McGraw-Hill Book Co., New York (1986)

[Merker 87] G.P. Merker, Konvektive Wärmeübertragung, Springer-Verlag, Berlin (1987)

[Messner 93] S. Messner, Finite-Elemente Berechnung der Fluid-Struktur-Wechselwirkung bei einem mikromechanischen Strömungssensor, Diplomarbeit, Universität Stuttgart / HSG-IMIT, Villingen-Schwenningen (1993) unveröffentlicht

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CAD & numerical calculation programs

In this dissertation used commercial CAD & numerical calculation programs

ANSYS

ANSYS (short form for ANalysis SYStem) is a finite element software developed by John A. Swanson. His company SASI (Swanson Analysis Systems Inc.), founded in 1970, developed the first versions of ANSYS up to version 5.1. After the sale in 1994 the company was renamed to Ansys Inc.

 

FIDAP

Fluid Dynamics International, FDI Inc., 500 Davis Street, Suite 600, Evanston, IL 60201 USA:

“FIDAP Fluid Dynamics Analysis Package uses a finite element approach for analysis of fluid & heat flow problems. Options are included for incompressible and compressible flow, laminar and turbulent flow, single and 2-phase flow, Newtonian or non-Newtonian rheology, heat flow by conduction, convection, and radiation, heat sources and sinks, solidification and melting, and lots more. The software includes mesh generation, data input, solution, and post-processing data visualization. Software versions of FIDAP (as of 1/93) are available for CONVEX, CRAY, DEC, FUJITSU, HEWLETT-PACKARD, IBM, SILICON GRAPHICS, STARDENT, and SUN computers. There is also a PC-version available.”

 

SDRC I-DEAS

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Author: Dr. Thomas Fabula

Thomas Fabula applies his profound experience in various functions for multinational corporations and medium-sized enterprises in different branches. As a former athlete his passion for sportive leadership enables him to motivate intercultural & cross-disciplinary teams in business environments to high-performance level.