Micro System Technologies 94
Herbert Reichl & Anton Heuberger (Herausgeber): Micro System Technologies ’94. 4th International Conference Berlin 1994 Contribution Monolithic…
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UETP-MEMS Course – Resonant microsensors
MEMS Resonant Microsensors UETP-MEMS Course: Resonant microsensors Thomas Fabula, Hans-Joachim Wagner, Institute of Microstructure and Information Technology (IMIT), Villingen-Schwenningen,…
COMETT-Course Resonant Microsensors
UETP-MEMS Course Proceedings, FSRM Neuchatel, Switzerland Resonant Microsensors University Enterprise Training Partnership project Objectives Resonant structures are one of…
Piezoelectrical driven Force Sensor
MME´94 Article from Journal of Micromechanics and Microengineering, Vol. 5, No. 2 (1995) 143-146, pesented at The Fifth European Workshop on Micromechanics (MME…
MEMS Patent
Monolithically integrated semiconductor element use thereof and method for producing such a semiconductor element Invention DE4332653 Monolithisch integriertes Halbleiterelement,…
Finite Element Programs
Finite Element Analysis program vendors August 1994 Commercially available finite element codes for numerical analyses program company distributor /…
MEMS Modal Analysis
Modal Analysis performed with ANSYS Modal Analysis of a Resonant diaphragm pressure sensor based on a silcon MEMS microstructure.…
Innovative sensor design
Triple-Beam Resonant Silicon Force Sensor Based on Piezoelectric Thin Films Authors Th. Fabula, H.-J. Wagner, B. Schmidt Institut für…
Multiphysics-Simulation Strömungssensor
11. CADFEM Users’ Meeting 27.-29. Oktober 1993 Bamberg Gekoppelte Feldberechnung eines mikromechanischen Strömungssensors Thomas Fabula, Nicolaus Hey, Stephan…
Resonant silicon sensors with electrothermal excitation
Resonante Silizium-Sensoren mit elektrothermischer Anregung und DMS in Metall-Dünnfilm-Technologie H. Bartuch*, S. Büttgenbach**, Th. Fabula***, H. Weiss* *…
Sensoren mit elektrothermischer Anregung
Resonante Silizium-Sensoren mit elektrothermischer Anregung und DMS in Metalldünnfilmtechnologie H. Bartuch*, S. Büttgenbach**, Th. Fabula***, H. Weiss* *…
Aufbau Mikrotechnik Forschungsinstitut
Microtechnology Research Institute Wissenschaftlicher Mitarbeiter Herr Dipl.-Phys. Thomas Fabula, ist seit dem 01.10.1988 als wissenschaftlicher Mitarbeiter am Institut für…