Herbert Reichl & Anton Heuberger (Herausgeber):

 

Micro System Technologies ’94.

4th International Conference

Berlin 1994

 

Contribution

Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications.

Authors

A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner

Laser system setup

Simulation results

Experimental measurements

Further information

 

Monolithic Bridge-on-Diaphragm Microstructures

Monolithic BOD-structure