Herbert Reichl & Anton Heuberger (Herausgeber):
Micro System Technologies ’94.
4th International Conference,
Berlin 1994
Contribution
Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications.
![](https://tfconsult.com/wp-content/uploads/1994/10/1992-10_Monolithic-Microbridges_in_Silicon_using_Laser-Machining-300x133.jpg)
Authors
A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner
![](https://tfconsult.com/wp-content/uploads/1994/10/Monolithic_Bridge-on-Diaphragm_Microstructures_for_Sensor-Applications-300x249.jpg)
Laser system setup
![](https://tfconsult.com/wp-content/uploads/1994/10/BOD_Laser_experimental_Setup-300x279.jpg)
Simulation results
![](https://tfconsult.com/wp-content/uploads/1994/10/BOD-simulation-results-300x244.jpg)
Experimental measurements
![](https://tfconsult.com/wp-content/uploads/1994/10/Silizium-BOD-Frequenz-Spektrum-296x300.jpg)
Further information
Monolithic Bridge-on-Diaphragm Microstructures
Silicon BOD-structures
Monolithic BOD-structure
Author: Dr. Thomas Fabula
http://www.tfconsult.com Thomas Fabula applies his profound experience in various functions for multinational corporations and medium-sized enterprises in different branches. As a former athlete his passion for sportive leadership enables him to motivate intercultural & cross-disciplinary teams in business environments to high-performance level.