Micro System Technologies ’94.

4th International Conference

Berlin 1994

Contribution

Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications.

Authors

A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner

Laser system setup

Simulation results

Experimental measurements

Further information

link.springer.com/journal/542/volumes-and-issues/1-1

Monolithic Bridge-on-Diaphragm Microstructures

Monolithic BOD-structure

Categories: Deep Technology, Industrie, R&DBy Dr. Thomas Fabula October 21, 1994

Author: Dr. Thomas Fabula

https://tfconsult.com

Thomas Fabula combines extensive multi-industry corporate and SME experience with an athletic leadership mindset, empowering diverse, cross-functional teams to achieve peak performance.