Herbert Reichl & Anton Heuberger (Herausgeber):
Micro System Technologies ’94.
4th International Conference
Berlin 1994
Contribution
Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications.

Authors
A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner

Laser system setup

Simulation results

Experimental measurements

Further information
Monolithic Bridge-on-Diaphragm Microstructures
Monolithic BOD-structure
Author: Dr. Thomas Fabula
https://tfconsult.com Thomas Fabula applies his profound experience in various functions for multinational corporations and medium-sized enterprises in different branches. As a former athlete his passion for sportive leadership enables him to motivate intercultural & cross-disciplinary teams in business environments to high-performance level.