Micro System Technologies 94
Herbert Reichl & Anton Heuberger (Herausgeber): Micro System Technologies ’94. 4th International Conference, Berlin 1994 Contribution Monolithic Bridge-on-Diaphragm Microstructures for Sensor-Applications. Authors A. Schumacher, M. Alavi, T. Fabula, B. Schmidt, H.-J. Wagner Laser system setup Simulation results Experimental measurements Further information https://link.springer.com/journal/542/volumes-and-issues/1-1 Monolithic Bridge-on-Diaphragm Microstructures Silicon BOD-structures Monolithic BOD-structure