Modal Analysis
performed with ANSYS
Modal Analysis of a Resonant diaphragm pressure sensor based on a silcon MEMS microstructure.
PERFORM A MODAL ANALYSIS THIS WILL BE A NEW ANALYSIS USE HOUSEHOLDER METHOD EXTRACT 5 MODES PRINT 0 REDUCED MODES NORMALIZE THE MODE SHAPES TO THE MASS MATRIX NUMBER OF MODES TO EXPAND= 5 DO NOT CALCULATE ELEMENT RESULTS PARAMETER TOTL = 50.00000 TOTAL MASTER D.O.F.= 50 NO ROTATIONAL MASTER KEY= 1 ***** ANSYS SOLVE COMMAND ***** ***** ANSYS - ENGINEERING ANALYSIS SYSTEM REVISION 5.0A ***** HAHN-SCHICKARD VERSION=HP 9000/7XX 11:35:43 AUG 24, 1994 CP= 1.000 FOR SUPPORT CALL THOMAS FABULA PHONE 07721/943-239 FAX Resonant diaphragm pressure sensor S O L U T I O N O P T I O N S PROBLEM DIMENSIONALITY. . . . . . . . . . . . .3-D DEGREES OF FREEDOM. . . . . . UX UY UZ ROTX ROTY ROTZ ANALYSIS TYPE . . . . . . . . . . . . . . . . .MODAL EXTRACTION METHOD. . . . . . . . . . . . . .REDUCED NUMBER OF MODES TO EXTRACT. . . . . . . . . . . 5 NUMBER OF REDUCED MODES TO PRINT. . . . . . . . 0 NUMBER OF MASTER DOF. . . . . . . . . . . . . . 50 NUMBER OF MODES TO EXPAND . . . . . . . . . . . 5 ELEMENT RESULTS CALCULATION . . . . . . . . . .OFF L O A D S T E P O P T I O N S LOAD STEP NUMBER. . . . . . . . . . . . . . . . 1 PRINT OUTPUT CONTROLS . . . . . . . . . . . . .NO PRINTOUT DATABASE OUTPUT CONTROLS. . . . . . . . . . . .ALL DATA WRITTEN ***** CENTROID, MASS, AND MASS MOMENTS OF INERTIA ***** CALCULATIONS ASSUME ELEMENT MASS AT ELEMENT CENTROID TOTAL MASS = .49282E-08 MOM. OF INERTIA MOM. OF INERTIA CENTROID ABOUT ORIGIN ABOUT CENTROID XC = 4.6000 IXX = .1387E-06 IXX = .3441E-07 YC = 4.6000 IYY = .1387E-06 IYY = .3441E-07 ZC = .00000E+00 IZZ = .2774E-06 IZZ = .6882E-07 IXY = -.1043E-06 IXY = .1323E-22 IYZ = .0000E+00 IYZ = .0000E+00 IZX = .0000E+00 IZX = .0000E+00 *** MASS SUMMARY BY ELEMENT TYPE *** TYPE MASS 1 .492816E-08 Range of element maximum matrix coefficients in global coordinates Maximum= 1909.14616 at element 20. Minimum= 1909.14616 at element 55. *** ELEMENT MATRIX FORMULATION TIMES TYPE NUMBER ENAME TOTAL CP AVE CP 1 100 SHELL43 1.640 .016 Time at end of element matrix formulation CP= 2.87. Estimated number of active DOF= 486. Maximum wavefront= 124. Time at end of matrix triangularization CP= 4.05. Equation solver maximum pivot= 7635.86132 at node 20 UX. Equation solver minimum pivot= 1.29617023 at node 109 ROTZ.***** EIGENVALUE (NATURAL FREQUENCY) SOLUTION ***** MODE FREQUENCY (CYCLES/TIME) 1 4202.44957 2 8728.82514 3 8885.92158 4 12931.8617 5 16428.5348 *** PROBLEM STATISTICS ACTUAL NO. OF ACTIVE DEGREES OF FREEDOM = 436 R.M.S. WAVEFRONT SIZE = 109.6 NUMBER OF MASTER DEGREES OF FREEDOM = 50 *** ANSYS BINARY FILE STATISTICS BUFFER SIZE USED= 4096 .531 MB WRITTEN ON ELEMENT MATRIX FILE: file.emat .266 MB WRITTEN ON ELEMENT SAVED DATA FILE: file.esav .391 MB WRITTEN ON TRIANGULARIZED MATRIX FILE: file.tri .047 MB WRITTEN ON MODAL MATRIX FILE: file.mode .125 MB WRITTEN ON RESULTS FILE: file.rst Acknowledgements Calculations performed at HSG-IMIT : www.hahn-schickard.de
