MEMS Modal Analysis

Modal Analysis performed with ANSYS   Modal Analysis of a Resonant diaphragm pressure sensor based on a silcon MEMS microstructure. PERFORM A MODAL ANALYSIS THIS WILL BE A NEW ANALYSIS USE HOUSEHOLDER METHOD EXTRACT 5 MODES PRINT 0 REDUCED MODES NORMALIZE THE MODE SHAPES TO THE MASS MATRIX NUMBER OF MODES TO EXPAND= 5 DO…