FE modeling of resonant sensors
Finite element modeling of frequency-analog sensors HSG-IMIT Institute for Micro- and Information Technology of the Hahn-Schickard-Gesellschaft for Applied Research e.V., Villingen-Schwenningen 2.1 Introduction 2.1.1 Functional principle of resonant sensors The principle of a resonant sensor is based on the dependence of the natural frequency of the resonator on an external physical variable…