Article from Journal of Micromechanics and Microengineering, Vol. 5, No. 2 (1995) 143-146, pesented at The Fifth European Workshop on Micromechanics (MME ’94), 5-6 September 1994, Pisa, Italy: Piezoelectrical driven resonant force sensor: fabrication and crosstalk by K. Funk, T. Fabula*, G. Flik, F. Lärmer Robert Bosch GmbH, Postfach 10 60 50, D-70049 Stuttgart, Germany *HSG-IMIT, Wilhelm-Schickard-Str.…
MEMS patent Monolithically integrated semiconductor element, use thereof and method for producing such a semiconductor element Invention DE4332653 (C1) Monolithisch integriertes Halbleiterelement, dessen Verwendung sowie Verfahren zur Herstellung eines solchen Halbleiterelements Germany DE4332653, September 1994 Inventors Erfinder ALAVI, Mani – Dipl.-Ing. Dr.rer.nat. [DE]; FABULA, Thomas – Dipl.-Phys. [DE]; SCHUMACHER, Axel – Dipl.-Phys. [DE]; WAGNER, Hans-Joachim – Dipl.-Phys. [DE] …
Finite Element Analysis vendors August 1994 Commercially available finite element codes for numerical analyses program company distributor / location ABAQUS ADINA ANSYS COSMOS/M I-DEAS MARC NASTRAN PERMAS Pro-Engineer PATRAN SYSTUS TPS10 HKS Adina R&D SASI SRAC SDRC MARC MSC INTES PTC PDA Framasys TSE Abacom GmbH / Aachen, FRG Watertown (MA) / USA CADFEM…
Modal Analysis performed with ANSYS Modal Analysis of a Resonant diaphragm pressure sensor based on a silcon MEMS microstructure. PERFORM A MODAL ANALYSIS THIS WILL BE A NEW ANALYSIS USE HOUSEHOLDER METHOD EXTRACT 5 MODES PRINT 0 REDUCED MODES NORMALIZE THE MODE SHAPES TO THE MASS MATRIX NUMBER OF MODES TO EXPAND= 5 DO…
Triple-Beam Resonant Silicon Force Sensor Based on Piezoelectric Thin Films Authors Th. Fabula, H.-J. Wagner, B. Schmidt Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft für angewandte Forschung e.V., Wilhelm-Schickard-Strasse 10, D-78052 Villingen-Schwenningen, Germany S. Büttgenbach Institut für Mikrotechnik der Technischen Universität Braunschweig, Langer Kamp 8, D-38106 Braunschweig, Germany Journal Sensors and Actuators A:…