COMETT-Course Resonant Microsensors

UETP-MEMS Course Proceedings, FSRM Neuchatel, Switzerland Resonant Microsensors University Enterprise Training Partnership project   Objectives Resonant structures are one of the mostly used techniques in sensor applications. High accuracy and cost effective signal processing are the key features of resonant sensors. By the end of the course, the participants will have a greater understanding of…

CAD Tools for MEMS

UETP-MEMS Course Proceedings FSRM Neuchatel, Switzerland University Enterprise Training Partnership MEMS project with the support of the European Programme COMETT   Objectives Modeling and numerical simulation of both the fabrication process and the operation of single devices and entire integrated systems are more and more necessary. Computer aided design (CAD) can reduce the number of…