Beulverhalten mikromechanischer Bauelemente

The “Dokumentation Mikrotechnik” contains abstracts and reviews of important papers from microtechnology and scientific literature. This monthly literature service is published by the Microsystems Engineering Service Unit of the HSG-IMIT. Here are some examples of interesting articles on the mechanical buckling behavior of micromechanical beam structures.   Geijselaers 1991 Das thermische Verhalten eines resonanten Sensors…