FEM-Simulationsrechnungen an Mikrostrukturen

FEM-Simulationsrechnungen an Mikrostrukturen   Posterdarstellung Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components ICC Berlin 10.-13. September 1990     “On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that…