Article from Journal of Micromechanics and Microengineering, Vol. 5, No. 2 (1995) 143-146, pesented at The Fifth European Workshop on Micromechanics (MME ’94), 5-6 September 1994, Pisa, Italy:   Piezoelectrical driven resonant force sensor: fabrication and crosstalk by K. Funk, T. Fabula*, G. Flik, F. Lärmer   Robert Bosch GmbH, Postfach 10 60 50, D-70049 Stuttgart, Germany *HSG-IMIT, Wilhelm-Schickard-Str. … Continue reading Piezoelectrical driven Force Sensor