Resonant Microsensors

CAE, Deep Technology, Industrie, R&D, Wissenschaft

Invited paper “Sensors and Materials”   Special Issue : Resonant Microsensors   Paper Analytical and finite element modeling of resonant silicon microsensors Authors: Thomas Fabula and Stephanus Büttgenbach Year of publication: 1997 Volume: 9 Number: 8 Pagination: 501-519   Keywords beam-on-diaphragm, pressure sensor, electromechanical coupling factor, finite-element modeling, modal analysis, mode coupling, piezoelectric thin films, resonant…

Publications

CAE, Engineering, Innovation, MINT, PLM, R&D, Software, Wissenschaft

Publications Papers in scientific & technical journals T. Brenner, S. Büttgenbach, T. Fabula, W. Rupprecht: „Real-time data acquisition system for laser and radiofrequency spectroscopy“, Journal of Physics E: Scientific Instruments, 21 (1988) 1150-1153 Thomas Fabula: „Finite-Elemente-Modellierung in der Mikromechanik“, Mikroelektronik Bd. 6 (1992) Heft 1, Fachbeilage Mikroperipherik, S.II Th. Fabula, B. Schmidt: „Modellierung mikromechanischer Sensoren…