Verbundforschung Mikrosystemtechnik

Einsatz der Mikromechanik zur Herstellung frequenzanaloger Sensoren   Villingen-Schwenningen 31. März 1993   Final report Application of micromechanics for the manufacturing of frequency-analogous sensors   Abstract “The most important types of micromechanical resonance sensors are bulk acoustic wave sensors, surface acoustic wave sensors and flexural plate wave sensors. In this report technologies for the preparation…